Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages
نویسندگان
چکیده
منابع مشابه
Calibration of Nanopositioning Stages
Accuracy is one of the most important criteria for the performance evaluation of microand nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications. However, their positioning accuracy and repeatability are not well known and difficult to guarantee, which induces many drawbacks for many application...
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ژورنال
عنوان ژورنال: Measurement
سال: 2017
ISSN: 0263-2241
DOI: 10.1016/j.measurement.2017.02.030